Shielded hydrogen passivation − A potential in‐line passivation process
نویسندگان
چکیده
منابع مشابه
Passivation of copper in silicon by hydrogen
The structures and energies of model defects consisting of copper and hydrogen in silicon are calculated using the AIMPRO local-spin-density functional method. For isolated copper atoms, the lowest energy location is at the interstitial site with Td symmetry. Substitutional copper atoms are found to adopt a configuration with D2d symmetry. We conclude that the symmetry is lowered from Td due to...
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ژورنال
عنوان ژورنال: physica status solidi (a)
سال: 2017
ISSN: 1862-6300,1862-6319
DOI: 10.1002/pssa.201700383